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Vacuum Deposition onto Webs, Films, and Foils

by Charles Bishop

2007 (497 pages)

ISBN:9780815515357

Written to guide operators and engineers as an onsite consultant would, this unique reference provides a broad appreciation of roll-to-roll vacuum deposition systems and processes.

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Vacuum Deposition onto Webs, Films, and Foils
Preface
Part 1 - Vacuum Basics
Chapter 1	-	Vacuum, What It Is and Why It Can Be Useful
Chapter 2	-	Products Using Vacuum Deposited Coatings
Chapter 3	-	Pressure Measurement
Chapter 4	-	Pumping
Chapter 5	-	Process Diagnostics and Coating Characteristics
Chapter 6	-	Leaks, Water Vapor, and Leak Testing
Chapter 7	-	Mass Spectrometers, Helium Leak Detectors, and Residual Gas Analyzers
Part 2 - Substrates, Surface Modification, and Nucleation
Chapter 8	-	Substrates—Surface Quality, Cleaning—Adhesion and Adhesion Testing
Chapter 9	-	Surface Treatment of Webs and Foils
Chapter 10	-	Nucleation, Coalescence, and Film Growth
Part 3 - Process
Chapter 11	-	The DC Glow Discharge or Plasma
Chapter 12	-	Electron Beam (E-Beam) Evaporation
Chapter 13	-	Thermal Evaporation
Chapter 14	-	Radiant Heated and Induction-Heated Sources
Chapter 15	-	Chemical Vapor Deposition/Polymerization onto Webs
Chapter 16	-	Planar Magnetron Sputtering—Source Design and Operation
Chapter 17	-	Planar Magnetron Design Options
Chapter 18	-	Reactive Sputter Deposition—Setup and Control
Part 4 - System Issues
Chapter 19	-	Machine Specification and Build Issues—Risk Analysis—Process
Chapter 20	-	Heat Load on the Webs/Foils
Chapter 21	-	Process Variables
Chapter 22	-	Mechanical Design
Chapter 23	-	Winding Webs in Vacuum
Chapter 24	-	Metallizer Machine Building Trends
Chapter 25	-	System Design
Chapter 26	-	Hazards
Chapter 27	-	Troubleshooting
Chapter 28	-	Final Thoughts