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Thin Film Materials Technology—Sputtering of Compound Materials

Thin Film Materials Technology: Sputtering of Compound Materials

by Kiyotaka Wasa, Makoto Haber and Hideaki Adachi

2004 (533 pages)

ISBN:9780815514831

Rich in coverage of both historical developments and the newest experimental and technological information about ceramic thin films, this invaluable resource explains sputter deposition technology in thin film production applications.

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Thin Film Materials Technology—Sputtering of Compound Materials
Preface
Chapter 1	-	Thin Film Materials and Devices
Chapter 2	-	Thin Film Processes
Chapter 3	-	Sputtering Phenomena
Chapter 4	-	Sputtering Systems
Chapter 5	-	Deposition of Compound Thin Films
Chapter 6	-	Structural Control of Compound Thin Films: Perovskite and Nanometer Oxide Thin Films
Chapter 7	-	Microfabrication by Sputtering
Appendix