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Smart MEMS and Sensor Systems

Smart Mems and Sensor Systems

by Elena Gaura and Robert Newman

2006 (553 pages)

ISBN:9781860944932

Integrating knowledge from MEMS technology, sensor system electronics and pervasive computing, this book presents readers with the means to understand, evaluate, appreciate and participate in the development of the field from a systems perspective.

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Table of Contents

Smart MEMS and Sensor Systems
Preface
Chapter 1	-	Markets and Applications
Chapter 2	-	Microfabrication Technologies
Chapter 3	-	Sensor Electronics
Chapter 4	-	Sensor Signal Enhancement
Chapter 5	-	Case Study—Control Systems for Capacitive Inertial Sensors
Chapter 6	-	Case Study—Adaptive Optics and Smart VLSI/MEMS Systems
Chapter 7	-	Artificial Intelligence Techniques for Microsensors Identification and Compensation
Chapter 8	-	Smart, Intelligent and Cogent Mems Based Sensors
Chapter 9	-	Sensor Arrays and Networks
Chapter 10	-	Wireless and AD HOC Sensor Networks
Chapter 11	-	Realising the Dream—A Case Study