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MEMS and Nanotechnology-Based Sensors and Devices for Communications, Medical and Aerospace Applications

MEMS and Nanotechnology-Based Sensors and Devices for Communications, Medical and Aerospace Applications

by A. R. Jha

2008 (434 pages)

ISBN:9780849380693

Presenting the latest performance parameters and experimental data of state-of-the-art sensors and devices, this book describes packaging details, materials and their properties, and fabrication requirements vital for design, development, and testing.

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Table of Contents

MEMS and Nanotechnology-Based Sensors and Devices for Communications, Medical and Aerospace Applications
Foreword
Preface
Chapter 1	-	Highlights and Chronological Developmental History of MEMS Devices Involving Nanotechnology
Chapter 2	-	Potential Actuation Mechanisms, Their Performance Capabilities, and Applications
Chapter 3	-	Latest and Unique Methods for Actuation
Chapter 4	-	Packaging, Processing, and Material Requirements for MEMS Devices
Chapter 5	-	RF-MEMS Switches Operating at Microwave and mm-Wave Frequencies
Chapter 6	-	RF/Microwave MEMS Phase Shifter
Chapter 7	-	Applications of Micropumps and Microfluidics
Chapter 8	-	Miscellaneous MEMS/Nanotechnology Devices and Sensors for Commercial and Military Applications
Chapter 9	-	Materials for MEMS and Nanotechnology-Based Sensors and Devices