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MEMS and Microsystems—Design, Manufacture, and Nanoscale Engineering, Second Edition

MEMS and Microsystems: Design, Manufacture, and Nanoscale Engineering, Second Edition

by Tai-Ran Hsu

2008 (576 pages)

ISBN:9780470083017

Supported by numerous examples, case studies, and applied problems to facilitate understanding and real-world application, this book covers both the electrical and the mechanical aspects of Microelectromechanical Systems.

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Table of Contents

MEMS and Microsystems—Design, Manufacture, and Nanoscale Engineering, Second Edition
Preface
Preface to the First Edition
Suggestions to Instructors
Chapter 1	-	Overview of MEMS and Microsystems
Chapter 2	-	Working Principles of Microsystems
Chapter 3	-	Engineering Science for Microsystems Design and Fabrication
Chapter 4	-	Engineering Mechanics for Microsystems Design
Chapter 5	-	Thermofluid Engineering and Microsystems Design
Chapter 6	-	Scaling Laws in Miniaturization
Chapter 7	-	Materials for Mems and Microsystems
Chapter 8	-	Microsystems Fabrication Processes
Chapter 9	-	Overview of Micromanufacturing
Chapter 10	-	Microsystems Design
Chapter 11	-	Assembly, Packaging, and Testing of Microsystems
Chapter 12	-	Introduction to Nanoscale Engineering
References
Appendix 1	-	Recommended Units for Thermophysical Quantities
Appendix 2	-	Conversion of Units