KuTenk 2000 - SIND262413-Micromanufacturing and Nanotechnology

by N. P. Mahalik 

2006 (477 pages)

ISBN:9783540253778

Incorporating a selection of research and development papers, this book looks at the history and background, underlying design methodology, application domains, and recent developments of micromanufacturing and nanotechnology.

Micromanufacturing and Nanotechnology

Preface

Chapter 1

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Introduction

Chapter 2

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Principles of MEMS and MOEMS

Chapter 3

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Laser Technology in Micromanufacturing

Chapter 4

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Soft Geometrical Error Compensation Methods Using Laser Interferometer

Chapter 5

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Characterising Etching Processes in Bulk Micromachining

Chapter 6

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Features of Surface Micromachining and Wafer Bonding Process

Chapter 7

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Micromanufacturing for Document Security—Optically Variable Devices

Chapter 8

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Nanofinishing Techniques

Chapter 9

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Micro and Nanotechnology Applications for Space Micropropulsion

Chapter 10

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Carbon Nanotube Production and Applications—Basis of Nanotechnology

Chapter 11

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Carbon based Nanostructures

Chapter 12

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Molecular Logic Gates

Chapter 13

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Nanomechanical Cantilever Devices for Biological Sensors

Chapter 14

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Micro Energy and Chemical Systems (MECS) and Multiscale Fabrication

Chapter 15

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Sculptured Thin Films

Chapter 16

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e-Beam Nanolithography Integrated with Nanoassembly—Precision Chemical Engineering

Chapter 17

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Nanolithography in the Evanescent Near Field

Chapter 18

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Nanotechnology for Fuel Cell Applications

Chapter 19

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Derivatisation of Carbon Nanotubes with Amines—A Solvent-free Technique

Chapter 20

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Chemical Crosslinking in C60 Thin Films